DV-502 high-vacuum evaporation

The DV-502 Thermal Evaporation system evaporates many of the metals and compounds involved in optical coatings, metalization, and electron microscope specimen preparation with no discernable contamination. The DV-502 also offers flexibility with a range of configurations available to meet your needs, including evaporation from a range of sources such as tungsten filaments, wire baskets, foil boats, baffle box heaters as well as carbon rod or yarn accessories.

  • Rotary Shadowing for Metals & Carbon
  • Metal & Dieletric Films
  • Recipe Development
  • Small Scale Production
  • Forensic Analysis
  • Failure Analysis
  • Quality Assurance

Capabilities & Features

  • High Vaccum Gate Valve for Rapid Cycling
  • Diffusion or Turbomolecular Pump Options
  • Dedicated Sputtering or Evaporation Capability
  • Integrated Thickness Monitors and Controllers
  • AC Glow for Sample Cleaning
  • Base Vacuum in the 1 x 106 Scale
  • 6” (150 mm) Diameter Substrate Size