| Magnification | x20 ~ x100.000 |
| Acceleration Voltage | 1kV~30kV |
| Electron Gun | Tungsten Filament (W) |
| Detector | SE |
| BSE Detector | Solid type 4 Channel |
| Stage | X: 35mm Y: 35mm Z: 0-60mm |
| T | 0 to 45° R: 360° |
| Vacuum System | Rotary Pump, Turbo |
| OS | Windows 7 |
| Operation | Mouse, Keyboard |
| Dimension | 400(W) x 600(L) x 500(H)mm |
| Molecular Pump | Less than 3min |
Options
Low vacuum, tensile stage, EDS, 3D reconstruction