CAMECA’s EX-300 is a unique LEXES based metrology tool supporting major semiconductor developments since the 90nm node era and following up the integration of the most diverse materials. It accelerates the time-to-market of your logic and memory devices and increases the integrated yield of your high volume production.<\/p>\n\n\n\n
The EX-300 benefits from over a decade of experience with LEXES technology in the semiconductor industry: dozens of LEXFAB-300 Shallow Probes have been installed at the top-ten semiconductor fabrication facilities worldwide. The EX-300 is targeted for new challenging applications such as SiGe and HKMG, and it is designed to accelerate the time to market of advanced logic & memory devices while achieving high production yield.<\/p>\n\n\n\n
The tool of choice for front-end process issues at 32nm node and beyond<\/strong> CAMECA’s EX-300 delivers enhanced long-term stability with excellent vacuum limit. The below graph shows reproducibility over several months for an average As dose of 1.97e15 at\/cm2 with a global RSD (1\u03c3) of 0.622%.<\/p>\n\n\n\n Advanced and robust pattern analysis<\/strong> Optimized design and easy tool control for high uptime<\/strong>
Based on the non-contact, non-destructive LEXES technique – a unique solution for direct measurement of the chemical composition at the surface and near surface – the EX-300 offers a panel of complementary capabilities enlarging the domains of classical metrology to current challenging processes:<\/p>\n\n\n\n
The EX-300 has been specifically designed to perform metrology of challenging patterned wafers down to 30×30\u00b5m pads.
Higher brightness is achieved with the new LaB6 gun, thus ensuring denser small probe. Improved light source and optics and a new digital camera with zooming capabilities enable smooth visual navigation while the new electrostatic chuck secures wafer clamping.<\/p>\n\n\n\n
The EX-300 delivers 5 to 20% throughput improvements compared to the previous Shallow Probe LEXFAB-300 model (depending on application). Improved ergonomics allow rapid maintenance and thus optimized MTTR. The fully integrated LEXES-Pilot software provides a user-friendly interface as well as reliable factory automation.\n\n<\/p>\n","protected":false},"featured_media":8286,"parent":0,"template":"","categoria_prodotto":[314],"class_list":["post-10743","prodotti","type-prodotti","status-publish","has-post-thumbnail","hentry","categoria_prodotto-cameca-en"],"acf":[],"yoast_head":"\n