TEM FEG

Resolution

• Point resolution: 0.37nm
• Line resolution: 0.2nm

Electron Gun

• Filament type: W / ZrO
• Acceleration voltage: 20~120kV
• Emission type: Schottky field emission
• Beam deflectors

Illumination System

• Two stage (optional three stage) Condenser Illumination System
• Switchable Parallel beam / Convergent Beam Illumination System
• C 2 diaphragm, motor automatic control
• Anastigmator beam deflector

Objective Lens System

• Symmetric Pole Pieces
• Constant power objective lens
• Objective lens diaphragm, motor automatic control
• Beam deflector

Imaging SystemLevel

• 4 magnifying glass
• Selection diaphragm, motor automatic control
• Automatic fast, door coil Pneumatic blocking needle

Observation and Recording System

• Dual camera, CCD fluorescent screen camera, and CMOS main camera
• Images are transmitted to the computer monitor for observation
• Pixel of main camera: 2K * 2K (optional 4K * 4K)
• Installation position of the main camera: bottom plug-in type
• Support for side plug-in camera extension

Stage System

• Four-a xis sample table X / Y / Z / R, motor automatic control Travel: X / Y: + 1mm, Z: + 0.35mm
• The R-axis tilt angle is ± 80°
• Single sample rod, multiple sample rod and double-tilt sample rod can be selected
• Vacuum System
• Oil free pump system
• Mechanical pump * 1, molecular pump * 1, ion pump * 3
• vacuum servo

STEM

• Resolution:0.26nm@120kV
• Can be equipped with BF DF ADF ABF HAADF and other PN-type detectors

Others

• Operating system: Windows
• 27-inch image display * 2, resolution 3840-2160
• Automatic Operating equipment: keyboard, mouse, knob control board
• function: automatic focus, automatic image dispersion, automatic image navigation
• Display mode: full-screen display, split-screen display
• Measurement function: support a variety of measurement marking tools, such as length, angle, diameter, etc
• Image annotation and data area: provide the standard data area, which can display the status menu of various EM parameters on the picture: display various working parameters